Cascade-microtech P800-S Manuel d'utilisateur

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PN 151-853-A www.cascademicrotech.com Pyramid Probe Card: P800-S Online Cleaning• 1
Objective
Particulate contamination can build up on the probe face and tips during probing. In some cases, particulate contamination
may go unnoticed by the user, while in others it can cause persistent open channels. Large, hard particles can crush probe
tips and are a leading cause of premature, catastrophic probe card failure. This application note describes the recommended
online cleaning methods for Pyramid Probes with a steel plunger stack, for example the P800-S (see Figure 1), when probing
solder balls.
This application note starts with some general information regarding contaminants that may be found in probing
environments. It then describes Cascade Microtech’s recommendations for online cleaning methods and a proposed
cleaning recipe. Finally, a procedure for determining the optimum value of online cleaning parameters is described.
Contaminants
Contaminants on Pyramid Probes can be divided into two general classes:
Particulate contaminants
Resistive-buildup contaminants
Particulate Contaminants
Particulate contamination can build up on the probe face and tips during probing. In some cases, particulate contamination
may go unnoticed by the user, while in others it can cause persistent open channels. Though unlikely in solder ball probing
applications, large, hard particles can crush probe tips and are a leading cause of premature, catastrophic probe card
failure.
Once particles have been transferred to the membrane, they are best removed by using the offline cleaning brush supplied
with your core. This procedure is described in the application note titled Pyramid Probe Cores Off-line Cleaning With Brush.
The best solution for particulate contamination, however, is removal of the particles at their source. A few simple
precautions can protect Pyramid Probes from particulate damage. To avoid accidental damage to the probe core:
Probe in a cleanroom environment.
Use extreme caution when probing correlation wafers.
Do not load or unload probe cards with the wafer on the chuck.
Do not share brushes between Pyramid Probes and other probe card technologies.
Do not touch the membrane, even with gloved hands.
Do regular preventative maintenance to clean the wafer area of the prober.
N
OTE
For details on cleaning Pyramid Probes with a plastic plungers, see the application note titled
“Online Cleaning Methods for Pyramid Probe Cards”.
Figure 1. P800-S mounted on a PCB.
i
Quick Reference Guide
Pyramid Probe Card: P800-S Online Cleaning
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Résumé du contenu

Page 1 - Contaminants

PN 151-853-A www.cascademicrotech.com Pyramid Probe Card: P800-S Online Cleaning• 1ObjectiveParticulate contamination can build up on the probe face a

Page 2 - Online Cleaning Materials

PN 151-853-A www.cascademicrotech.com Pyramid Probe Card: P800-S Online Cleaning• 2Resistive-Buildup Contaminants From SolderResistive buildup contami

Page 3 - Online Cleaning Instructions

PN 151-853-A www.cascademicrotech.com Pyramid Probe Card: P800-S Online Cleaning• 3Table 1. Recommended, acceptable and unacceptable online cleaning m

Page 4 - Online Cleaning Parameters

PN 151-853-A www.cascademicrotech.com Pyramid Probe Card: P800-S Online Cleaning• 4Online Cleaning ParametersGeneral PrecautionsWhen using a prober or

Page 5 - Overtravel

PN 151-853-A www.cascademicrotech.com Pyramid Probe Card: P800-S Online Cleaning• 5Cleaning Pyramid Probe cards by contacting a cleaning substrate tak

Page 6

PN 151-853-A www.cascademicrotech.com Pyramid Probe Card: P800-S Online Cleaning• 6Procedure: Determining Cleaning ParametersUse the following procedu

Page 7 - Troubleshooting

PN 151-853-A www.cascademicrotech.com Pyramid Probe Card: P800-S Online Cleaning• 79. Determine the optimum overtravel using the same strategy. Start

Page 8 - Abrasive Cleaning

PN 151-853-A www.cascademicrotech.com Pyramid Probe Card: P800-S Online Cleaning• 8Recommended Offline Cleaning Methods and MaterialsBrush CleaningRef

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